Generating calibration gas with a permeation tube
Permeation tube hydrogen fluorideP-17-5
Concentration range 0.3 - 29 ppm
*As Permeation tubes have individual differences in permeation rates, the above concentration ranges may differ slightly from the actual range that can be controlled.
![Permeation tube hydrogen fluoride P-17-5](/files/topics/2189_ext_07_0.jpg)